We just got our brand new Zeiss Gemini 560 ultrahigh resolution SEM installed (serial number #0001!) with the new Gemini 3 electron optics and an Oxford EDX system. The SEM features sub-nanometer resolution and can even take images in sTEM mode.
Our head of cleanroom Dr. Mario Hentschel is proud to have this state of the art machine available for our new ZAQuant (Center for applied quantum technology) building.